Abstract: Expermental results of the preparation of YBaCuO superconductor thin film on Si(100) substrate by the method of ion beam sputtering deposition is presented.A ZrO_2 buffer layer was applied to Si(100)substrate,and was found to play an important role in resisting the diffusion of Si toward the film.The thin film is mainly a 123 phase with strong c-axis prefer- red orientation.The onset transition temperature of the film is 100 K and the final transition temperature 78 K.

Key words: superconductor, YBaCuO, thin film, Si substrate