Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures

doi:10.1007/s40195-014-0177-5

Abstract

Abstract:

ZnO films were prepared at different substrate temperatures through spraying pyrolysis deposition of zinc chloride precursor onto glass substrate. Substrate temperature affects surface morphology of films and therefore their optical and electrical properties. All films are polycrystalline with Wurtzite crystal structure and preferentially grow along c-axis direction. Formation of ZnO rods start at about 500°C. The diameter and length of rods deposited at 500°C are 350-500 and 550-700nm, respectively. By increasing substrate temperature, film becomes more coverage and diameter of the rods reduces to 250-300nm but their length increases to 1,000-1,200 nm, respectively. Optical transmission in visible region decreases with increasing substrate temperature. An ultraviolet emission and two visible emissions at 2.82 and 2.37eV are observed for photoluminescence spectra at room temperature. The resistivity of ZnO films increases with increasing substrate temperature due to surface morphology.

Key words: ZnO, Rods, Spray pyrolysis, Substrate temperature, Surface morphology

Fahimeh Zahedi, Reza Sabet Dariani, Seyed Mohammad Rozati. Spray Pyrolysis Deposition of ZnO Thin Films from Zinc Chloride Precursor Solution at Different Substrate Temperatures[J]. Acta Metallurgica Sinica (English Letters), 2015, 28(1): 110-114.

Figures/Tables 6

Fig. 1 XRD patterns of ZnO films prepared at different substrate temperatures

Table 1 Structural parameters of ZnO films prepared at different substrate temperatures

Substrate temperature (°C)	Lattice constants (Å)		Diameter of rods (nm)	Length of rods (nm)
Substrate temperature (°C)	a	c	Diameter of rods (nm)	Length of rods (nm)
400	3.253	5.204	-	-
450	3.253	5.202	-	-
500	3.254	5.203	350-500	550-700
550	3.248	5.200	250-350	1,000-1,200

Fig. 2 Top view FESEM of ZnO films prepared at different substrate temperatures: a 400 °C; b 450 °C; c 500 °C; d 550 °C

Fig. 3 Cross-sectional FESEM images of ZnO films prepared at different substrate temperatures: a 500 °C; b 550 °C

Fig. 4 Optical transmission spectra of the ZnO films prepared at different substrate temperatures

Fig. 5 PL spectra for ZnO films prepared at different substrate temperatures with the excitation wavelength of 325 nm

References 29

[1]	C.W. Bunn,Proc. Phys. Soc. 47, 835(1935)
[2]	M. Rajabi, R.S. Dariani,A. Iraji zad, F. Zahedi, Solid State Electron. 80, 33(2013)
[3]	N. Beermann, L. Vayssieres, S.E. Lindquist, A. Hagfeldt, J. Electrochem.Soc. 147, 2456(2000)
[4]	T. Soga, Nanostructured Materials for Solar Energy Conversion ( Elsevier,Amsterdam, 2006)
[5]	L. Schlur, A. Carton, P. Leveque, D. Guillon, G. Pourroy, J. Phys.Chem.C 117, 2993 (2013)
[6]	N.H. Alvi, W. Hassan, B. Farooq, O. Nur, M. Willander,Mater. Lett. 106, 158(2013)
[7]	M. Rajabi, R.S. Dariani, A.I. Zad, J.Alloys Compd. 509, 4295(2011)
[8]	A.N. Giorgobiani, A.N. Kozintsev, V.I. Kozlovskii, Z.I. Makovei, A.N. Redkin, Y.K. Skasyrskii,Inorg. Mater. 42, 750(2006)
[9]	R. Zhang, L.L. Kerr,J. Solid State Chem. 180, 988(2007)
[10]	P. Nunes, E. Fortunato, P. Tonello, F. Braz, Fernandes, P. Vilarinho, R. Martins. Vacuum 64, 281 (2002)
[11]	N. Audebrand, J.P. Auffredic, D. Louer,Chem. Mater. 10, 2450(1998)
	F. Zahedi, R.S. Dariani, Thin Solid Films 520, 2132 (2012)
[13]	M. Krunks, T. Dedova, I.O. Acik, Thin Solid Films 515, 1157 (2006)
[14]	U. Alver, T. Kilinc, E. Bacaksiz, S. Nezir,Mater. Chem. Phys. 106, 227(2007)
[15]	P.S. Patil,Mater. Chem. Phys. 59, 185(1999)
[16]	H.Z. Zhang, X.C. Sun, R.M. Wang, D.P. Yu, J.Cryst.Growth 269, 464 (2004)
[17]	B.D. Cullity, S.R. Stock, Elements of X-Ray Diffraction (Prentice Hall,New Jersey, 2001)
[18]	A. Avisou, C. Dufour, K. Dumesnil, D. Pierre, J. Cryst.Growth297, 239 (2006)
[19]	A. Mosbah, A. Maustaghfir, S. Abed, N. Bouhssira, M.S. Aida, E. Tomasella, M. Jacquet,Surf. Coat. Technol. 200, 293(2005)
[20]	D.K. Schroder, Semiconductor Material and Device Characterization ( Wiley,New York, 1998)
[21]	U. Alver, T. Kılınç, E. Bacaksız, T. Küçükömeroğlu, S. Nezir, İ.H. Mutlu, F. Aslan, Thin Solid Films 515, 3448 (2007)
[22]	L. Dong, Y.C. Liu, Y.H. Tong, Z.Y. Xiao, J. Colloid Interf.Sci. 283, 380(2005)
[23]	B.Z. Dong, G.J. Fang, J.F. Wang, W.J. Guan, X.Z. Zhao, J. Appl.Phys. 101, 033713(2007)
[24]	A.B. Djurisic, Y.H. Leung, Small 2, 944 (2006)
[25]	B. Huang, G. He, H. Yang, Phys.B 405, 4101 (2010)
[26]	K. Vanheusden, W.L. Warren, C.H. Seager, D.R. Tallant, J.A. Voigt, B.E. Gnade, J. Appl.Phys. 79, 7983(1996)
[27]	S. Mridha, D. Basak,Mater. Res. Bull. 42, 875(2007)
[28]	D.H. Tassis, C.A. Dimitriadis, J. Brini, G. Kamarinos, A. Birbas, J. Appl.Phys. 85, 4091(1999)
[29]	S.C. Chang, J. Vac.Sci.Technol. 17, 366(1980)

[1]	Jin-Xiu Li, Jun-Xiu Chen, M. A. Siddiqui, S. K. Kolawole, Yang Yang, Ying Shen, Jian-Ping Yang, Jian-Hua Wang, Xu-Ping Su. Enhancing Corrosion Resistance and Antibacterial Properties of ZK60 Magnesium Alloy Using Micro-Arc Oxidation Coating Containing Nano-Zinc Oxide [J]. Acta Metallurgica Sinica (English Letters), 2025, 38(1): 45-58.
[2]	Shuohong Gao, Xingchen Yan, Cheng Chang, Xinliang Xie, Qingkun Chu, Zhaoyang Deng, Bingwen Lu, Min Liu, Hanlin Liao, Nouredine Fenineche. Finished surface morphology, microstructure and magnetic properties of selective laser melted Fe-50wt% Ni permalloy [J]. Acta Metallurgica Sinica (English Letters), 2022, 35(9): 1439-1452.
[3]	Xin Li, Huaping Wang, Wenchao Zhang, Yuezhan Feng, Jianmin Ma. S-Doped Carbon-Coated FeS₂/C@C Nanorods for Potassium Storage [J]. Acta Metallurgica Sinica (English Letters), 2021, 34(3): 321-328.
[4]	Wen-Ge Li, Yan-Jie Hu, Hao Jiang, Chun-Zhong Li. Aerosol Spray Pyrolysis Synthesis of Porous Anatase TiO₂ Microspheres with Tailored Photocatalytic Activity [J]. Acta Metallurgica Sinica (English Letters), 2019, 32(3): 286-296.
[5]	Osama Saber, Haifa Alomair, Mohamed Abu-Abdeen, Abdullah Aljaafari. Fast Degradation of Green Pollutants Through Nanonets and Nanofibers of the Al-Doped Zinc Oxide [J]. Acta Metallurgica Sinica (English Letters), 2018, 31(5): 533-546.
[6]	K. Nithiyadevi, K. Ravichandran. Enhancement of Photocatalytic and Antibacterial Activities of ZnO:Ag Nanopowders Through the Addition of Bamboo Charcoal: An Efficient Natural Adsorbent [J]. Acta Metallurgica Sinica (English Letters), 2017, 30(12): 1249-1256.
[7]	Rafieh Meraat, Ali Abdolahzadeh Ziabari, Khosro Issazadeh, Nima Shadan, Kamyar Mazloum Jalali. Synthesis and Characterization of the Antibacterial Activity of Zinc Oxide Nanoparticles against Salmonella typhi [J]. Acta Metallurgica Sinica (English Letters), 2016, 29(7): 601-.
[8]	V. Chandrakala, J. Annai Joseph Steffy, Neena Bachan, W. Jothi Jeyarani, Tenzin Tenkyong, J. Merline Shyla1. A Comparative Investigation of Dye-Sensitized Titanium Dioxide (TiO₂) Nanorods Grown on Indium Tin Oxide (ITO) Substrates by Direct and Seed-Mediated Hydrothermal Methods [J]. Acta Metallurgica Sinica (English Letters), 2016, 29(5): 457-463.
[9]	Qiu-Hong Wang, Chao-Long Tang, Cheng-Ming Jiang, Dan-Feng Du, Feng Wang, Jin-Hui Song. Role of Substrate Roughness in ZnO Nanowire Arrays Growth by Hydrothermal Approach [J]. Acta Metallurgica Sinica (English Letters), 2016, 29(3): 237-242.
[10]	Husam S. Al-Salman, M. J. Abdullah. Annealing Effects on the Structural, Optical, and UV Photoresponse Properties of ZnO Nanostructures Prepared by RF-Magnetron Sputtering at Different Deposition Temperatures [J]. Acta Metallurgica Sinica (English Letters), 2015, 28(2): 230-242.
[11]	P. Sathish, K. Ravichandran, B. Sakthivel, A. Panneerselvam. Enhancing the Antibacterial Efficiency of ZnO Nanopowders Synthesized by Combustion Method Through Ag + Fe Co-doping [J]. Acta Metallurgica Sinica (English Letters), 2015, 28(11): 1407-1413.
[12]	N. R. Panda, D. Sahu, B. S. Acharya, P. Nayak, S. P. Pati, D. Das. Effect of Zn Concentration on Microstructural, Optical, and Hyperfine Properties of Nanocrystalline α-Fe₂O₃ [J]. Acta Metallurgica Sinica (English Letters), 2014, 27(4): 563-568.
[13]	Biplob Mondal, Lachit Dutta, Chirosree Roychaudhury, Dambarudhar Mohanta, Nillohit Mukherjee, Hiranmay Saha. Effect of Annealing Temperature on the Morphology and Sensitivity of the Zinc Oxide Nanorods-Based Methane Senor [J]. Acta Metallurgica Sinica (English Letters), 2014, 27(4): 593-600.
[14]	Aniruddh Bahadur Yadav, Amritanshu Pandey, S. Jit. Effects of Annealing Temperature on the Structural, Optical, and Electrical Properties of ZnO Thin Films Grown on n-Si〈100〉 Substrates by the Sol–Gel Spin Coating Method [J]. Acta Metallurgica Sinica (English Letters), 2014, 27(4): 682-688.
[15]	Deene Manikprabhu, K. Lingappa. Microwave Assisted Rapid Bio-based Synthesis of Gold Nanorods Using Pigment Produced by Streptomyces coelicolor klmp33 [J]. Acta Metallurgica Sinica (English Letters), 2013, 26(5): 613-617.