SYNTHESIS OF TiN FILM WITH ION BEAM ENHANCED DEPOSITION AND ITS PROPERTIES
ZHOU Jiankun LIU Xianghuai CHEN Youshan WANG Xi ZHENG Zhihong HUANG Wei ZOU Shichang Shanghai Institute of Metallurgy,Academia Sinica,Shanghai,China
Acta Metallurgica Sinica (English Letters) . 1990, (11): 345 -349 . 

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