PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES
WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory,Shanghai Institute of Metallurgy,Academia Sinica,shanghai,China
Acta Metallurgica Sinica (English Letters) . 1992, (11): 370 -374 . 

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