STUDY OF THE INJURY OF THE Ar+ INJECTION Si LAYER BY THE USE OF XRD AND ELLIPSOMETER
G.Q.Wang,F.F.Jiang and X.N.Wang Basic Lessons Department, Shengyang University, Shengyang 110044, China
Acta Metallurgica Sinica (English Letters) . 1999, (5): 1033 -1037 . 

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