Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO2 and O2 as Reactive Gas

Dong Xie; Feng Wen; Wenmao Yang; Xueyuan Li; Yongxiang Leng; Guojiang Wan; Hong Sun; Nan Huang

doi:10.1007/s40195-014-0049-z

Acta Metallurgica Sinica (English Letters) >

2014 , Vol. 27 >Issue 2: 239 - 244

DOI: https://doi.org/10.1007/s40195-014-0049-z

research-article

Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO₂ and O₂ as Reactive Gas

Dong Xie ,
Feng Wen ,
Wenmao Yang ,
Xueyuan Li ,
Yongxiang Leng ,
Guojiang Wan ,
Hong Sun ,
Nan Huang

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1. School of Physical Science and Technology, Southwest Jiaotong University, Chengdu, 610031, China
2. Key Laboratory for Advanced Technologies of Materials, Ministry of Education, School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, 610031, China
3. Key Laboratory of Tropical Biological Resource of Chinese Educational Ministry, School of Materials and Chemical Engineering, Hainan University, Haikou, 570228, China
4. Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang, 621900, China

Received date: 2013-04-27

Revised date: 2013-10-31

Online published: 2014-05-07

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Abstract

CO₂ and O₂ were employed as reactive gases to fabricate carbon-doped titanium oxide films using DC reactive magnetron sputtering. Microstructure, composition and optical band gap of the films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and UV–visible spectrophotometer, respectively. The results showed that carbon-doped titanium monoxide films (C-TiO) with a carbon concentration of 5.8 at.% were obtained in an Ar/CO₂ mixed atmosphere. However, carbon-doped rutile and anatase (C-TiO₂) with a carbon concentration of about 1.4 at.% were obtained in an Ar/CO₂/O₂ mixed atmosphere. The optical band gaps of C-TiO and C-TiO₂ were about 2.6 and 2.9 eV, respectively. Both of them were narrower than that of pure TiO₂ films. Films with narrowed optical band gap energy are promising in promoting their photo-catalytic activity.

Key words： Carbon-doped titanium oxide films; Optical band gap; DC reactive magnetron sputtering

Cite this article

Dong Xie , Feng Wen , Wenmao Yang , Xueyuan Li , Yongxiang Leng , Guojiang Wan , Hong Sun , Nan Huang . Carbon-Doped Titanium Oxide Films by DC Reactive Magnetron Sputtering Using CO₂ and O₂ as Reactive Gas[J]. Acta Metallurgica Sinica (English Letters), 2014 , 27(2) : 239 -244 . DOI: 10.1007/s40195-014-0049-z

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