Acta Metallurgica Sinica (English Letters) >
Preparation and Characterization of LiTaO3 Films Derived by an Improved Sol-Gel Process
Received date: 2012-12-12
Revised date: 2013-03-08
Online published: 2013-05-06
Supported by
National Natural Science Foundation of China (Nos. 61006036 and 61235006) and New Century Excellent Talents in University (No.NCET-10-0299).
In this paper, an improved sol-gel method was suggested to obtain high-concentration LiTaO3 precursor solution for simplified experimental conditions and thicker films, by mixing lithium acetate and tantalum ethoxide in a 1, 2-Propylene glycol solution. Compared to traditional methods, the process was done without weak acidic solution and absolute dry experimental condition. Results of a comparative study of LiTaO3 thin films derived by the improved sol-gel process and a traditional process using 2-methoxy ethanol as solvent were presented. Nano-crystalline LiTaO3 films with rhombohedral structures were formed in both methods after annealing at 650℃ for 5 min. The thickness of each LiTaO3 layer coated onto the substrate increased from 25 nm to 110 nm when 2-methoxy ethanol was replaced by 1, 2-Propylene glycol. LiTaO3 films with a stronger preferential orientation were obtained in 1, 2-Propylene glycol due to its higher boiling point and slower volatilization rate. On the other hand, the diffraction peak intensity of LiTaO3 thin films prepared using 1, 2-Propylene glycol was weaker than that of the films prepared using 2-methoxy ethanol due to decreased times of annealing.
Key words： LiTaO3; Thin film; Sol-gel; Crystallization
Jun GOU , Jun WANG , Ming YANG , Zehua HUANG , Weizhi LI and Yadong JIANG . Preparation and Characterization of LiTaO3 Films Derived by an Improved Sol-Gel Process[J]. Acta Metallurgica Sinica (English Letters), 2013 , 26(3) : 299 -302 . DOI: 10.1007/s40195-013-0035-x
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