Abstract: Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9titanium as the target and is copper slice as the substrate. In this article, the optical characteristics and microstructure of TiNxOy thin film were studied. Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.

Key words: spectrum selecting absorbent film, TiNxOy, magnetron sputtering