Abstract: The techniques for surface analysis including AES,XPS and SIMS were employed to study the chemical composition and bond valence of nitrogen ion implanted surface of surgical implantation service alloy Ti6Al4V.The depth of implanted nitrogen ions and the sputtering rate of argon beams were determined using a profilometer.It was found that the combination of injected nitrogen ions with titanium resulted in the formation of hard TiN particles and the profile of nitrogen concentration approximately displayed gaussian distribution.The total depth of implanted nitrogen is about 350 nm and its maximum concentration appears in the depth of about 140 nm from the surface,in which the concentration ratio of nitrogen to titanium may be up to 1.1.

Key words: Ti6Al4V, nitrogen ion implantation, surface analysis