Abstract: The reaction kinetie model for the synthesis of ultrafine TiN powder from vapour phase sys- tem TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reactor was proposed as follows: 1/V((dn_(TiCl_4))/dt)=0.852e~(-63.2·RT)P_(TiCl_4) The majority of factors influenced upon the reaction rate were analysed,so as to provide the theoretical basis for improving quality of TiN powder and for optimizing the design of plasma reactor.

Key words: TiN, plasma, kinetics