Abstract: Investigation was made of the sputtering rate in glow discharge lamp with relaion to constituent of 25 different specimens of 6 binary systems.namely,Cr-Fe,Bi-Sb,Cu-Zn, Ag-Cu,Al-Zn and Cd-Sn.by measuring mass loss sfter each sputtering under constant Ar pressure and voltage applicd.The correlation.in general,between sputtering rate and concentration of constituent of these non-intermetallic binary alloys obeys the hyperbolic law under steady state,that may be approximately regarded as linear correlation only on certain special condition if the two components of the alloys with similar sputte ringrates.

Key words: eathode sputtering, glow discharge, binary alloy, sputtering rate